Atomic force acoustic microscopy methods to determine thin-film elastic properties
نویسندگان
چکیده
منابع مشابه
Atomic force acoustic microscopy methods to determine thin-film elastic properties
Atomic force acoustic microscopy methods to determine thin-film elastic properties" (2003). We discuss atomic force acoustic microscopy ͑AFAM͒ methods to determine quantitative values for the elastic properties of thin films. The AFAM approach measures the frequencies of an AFM cantilever's first two flexural resonances while in contact with a material. The indentation modulus M of an unknown or ...
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Abbreviations a 1 , a 2 , a 3 , a 4 and A 1 , A 2 , A 3 , A 4 Constants in the shape function y(x) a C Contact radius α Wave number of the flexural waves A Cross-section area of the cantilever b Thickness of the cantilever c P Ratio φ Lat /φ d Y 0 , d X0 Normalized amplitude of the sensor tip in y-and x-direction, respectively δ n , δ L Normal, lateral contact deflection (in the coordinate syst...
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ژورنال
عنوان ژورنال: Journal of Applied Physics
سال: 2003
ISSN: 0021-8979,1089-7550
DOI: 10.1063/1.1592632